Specifications

frame-PECVDProcess :
● Apply to 125/156 size wafers
● Compatible to different sizes of  tube PECVD equipment and  plate  PECVD equipment

Features :
● Loading and unloading : Cassette or Stack
● Output : graphite boat/ graphite carrier box
● Optional Boat temperature monitoring
● Optional online color inspection
● Optional support MES interface and remote debug function
● Optional robot interface
● Smart Machine, OEE statistics & Energy consumption analysis

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