Specifications

frame-ks

Process :
● Apply to 125/156 size wafers
● Compatible to different brands of wafer diffusion equipment and different sizes of quartz boat

 

 

 

Features :
● Loading and unloading:Cassette
● Output :quartz boat
● Optional online square resistance
● Optional support MES interface and remote debug function
● Optional  robot interface
● Smart Machine, OEE statistics & Energy consumption analysis

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