Specifications

frame-PERCProcess :
● Apply to 125/156 size wafers
● Compatible to different sizes of PERC equipment

Features :
● Loading and unloading:Cassette
● 3-lanes loading, 3-lanes unloading
● Output :graphite cart
● Optional support MES interface and remote debug function
● Optional robot interface
● Smart Machine, OEE statistics & Energy consumption analysis

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