Specifications

frame-ks

Process :
● Adapt to M2 (156.75), M4 (161.75), G1 (158.75), M6 (166), M10 (182), M12 (210) and 230mm silicon wafers
● Compatible to different sizes of tube PECVD equipment and plate PECVD equipment Suitable for HJT process

Features :
● Loading and unloading: Cassette
● Output: graphite carrier box
● Optional PL test
● Clean room class 1000
● Carrier board automatic cleaning function
● Optional support MES function and remote diagnosis function
● Optional smart IGV interface
● Intelligent machine, OEE statistics and energy consumption analysis function

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