Specifications

frame-PERCProcess :
● Adapt to M2 (156.75),M4 (161.75),G1 (158.75),M6 (166),M10(182),M12(210) and 230mm silicon wafers
● Compatible to different sizes of PERC equipment

Features :
● Loading and unloading: Cassette or Stack
● 3 feeding, 3 unloading
● Output: graphite carrier box
● Optional support MES interface and remote debug function Optional smart IGV interface
● OEE statistics & Energy consumption analysis Consumption analysis function

PDF Download